Area-Selective Etching of Poly(methyl methacrylate) Films by
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Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

Polymers, Free Full-Text

Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

PDF) Is poly(Methyl methacrylate) (PMMA) a suitable substrate for ALD?: A review

Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

Low Temperature Area Selective Atomic Layer Deposition of Ruthenium Dioxide Thin Films Using Polymers as Inhibition Layers - Poonkottil - 2023 - Advanced Materials Interfaces - Wiley Online Library

Strategy used for Al 2 O 3 mask fabrication and subsequent nanopillar

Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

Area-Selective Deposition of Ruthenium by Combining Atomic Layer Deposition and Selective Etching

Polymers, Free Full-Text

Fluorine-containing polymeric inhibitor for highly selective and durable area-selective atomic layer deposition - ScienceDirect
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