a) Overall view of the CMOS-MEMS high-frequency resonator. (b
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CMOS-MEMS process cross-section before release (a), after release
Newly developed GaN based MEMS resonator operates stably even at
CMOS–MEMS resonators: From devices to applications - ScienceDirect
Mechanically coupled CMOS-MEMS free-free beam resonator arrays
CMOS-MEMS Resonators
a) Overall view of the CMOS-MEMS low-frequency resonator. (b) Pull
CMOS-MEMS resonators and their applications
Design, fabrication, characterization and reliability study of
Geometric stress-compensation for a high frequency lateral
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